A new SOI monolithic capacitive sensor for absolute and differential pressure measurements

نویسندگان

  • P. D. Dimitropoulos
  • C. Kachris
چکیده

In the present work, a new monolithic capacitive pressure sensor is being introduced. The sensor is manufactured according to a custom, 15-step SOI process. The process primarily offers great flexibility as far as sensor design is concerned. Absolute or differential pressure sensing is possible by simply arranging proper sensor package. Measurement sensitivity and span are easily regulated over a wide range of values by setting one-single design parameter. Attention is paid to avoid p–n junction formation in order to improve the sensor robustness a i i A t c a r ©

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تاریخ انتشار 2005